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Class Schedule

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For more information about this course or to schedule a class, please contact TEDD.
This course can be scheduled to meet your specific requirements.

Course Description


SCP004 - Wet/Dry Etch Process Overview - 8.00 Hours

Prerequisites

    Semiconductor Processing Overview Course offered through TEEX or course equivalent.

Description

    This course is designed for the Semiconductor Processing Industry to provide professional development for a broad audience of employees working for semiconductor manufacturers and suppliers. It is one of a series of overview courses developed to cover process issues for each major semiconductor processing step. This particular course stresses the fundamentals of current processes used in wet/dry etch. While the course is technical in nature it does not focus on specific process related information. It provides a broad overview of the wet/dry etch process and the general principles that are involved. The course also assists participants in understanding in general terms the potential relationship of wet/dry etch to the upstream and downstream processes in the Semiconductor Industry.

Topics

  • Introduction to semiconductor processing steps
  • Introduction to etching and it's purpose
  • Introduction to the two types of etching and their uses
  • Wet etching processes
  • Dry (plasma) etching processes
  • Dry etch of silicon processes
  • Dry etch of metals and silicides
  • Photoresist ashing

Audience

    All skill levels having an interest in an introduction to the wet/dry etch process and those who require a broad overview of the specific process. This course would assist support staff, equipment operators, entry-level technicians, process and equipment maintenance technicians, entry-level engineers and new hire professional staff in understanding the wet/dry etch process.

Other Information

To have this class taught on site please call customer service at 1-800-541-7149 for more information or email us at ted@teexmail.tamu.edu

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